Course Description

The electron microprobe provides a complete micron-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic X-rays excited by an electron beam, incident on a flat surface of the sample. This course provides an introduction to the theory of X-ray microanalysis by wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and different imaging techniques including scanning backscattered electron (BE), scanning secondary electron (SE), scanning X-ray (by WDS or EDS, also known as compositional or elemental maps), and scanning cathodoluminescence (CL) imaging. Lab sessions involve hands-on use of the JEOL JXA-733 Superprobe.

Syllabus

Theory of X-ray Spectrometry

• Electron-specimen Interactions
  • Elastic Scattering: Electron Backscattering
  • Inelastic Scattering: Secondary Electron Excitation
    • Continuum X-ray Generation, Characteristic X-ray Generation
  • Interaction Volume
• Matrix Corrections
  • Atomic Number, Absorption and Characteristic Fluorescence Corrections
  • Continuum Fluorescence Correction
  • Φ(ρz) Corrections

Instrumentation

Imaging Techniques

Quantitative Analysis

Recommended Textbook

Goldstein, J. I., D. E. Newbury, P. Echlin, D. C. Joy, A. D. Romig Jr., C. E., Lyman, C. Fiori, and E. Lifshin. Scanning Electron Microscopy and X-ray Microanalysis: A Text for Biologists, Material Scientists, and Geologists. 2nd ed. New York, NY: Plenum Press, 1992.

Other Books

Reed, S. J. B. Electron Microprobe Analysis and Scanning Electron Microscopy in Geology. Cambridge, UK: Cambridge Univ. Press, 1996.

Scott, V. D., G. Love, and S. J. B. Reed. Quantitative Electron-Probe Microanalysis. 2nd ed. New York, NY: Ellis-Horwood, 1995.

Grading

The basis for the grade is completion of all the lab exercises (problem sets) and correctly solving problem 3B.